IEC TR 63258-2021 pdf free
IEC TR 63258-2021 pdf free.Nanotechnologies – A guideline for ellipsometry application to evaluate the thickness of nanoscale films.
This document, which is a Technical Report, is focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers. but suggests how to minimize the data variation to improve data reproducibility.
This document includes
– outlines of the ellipsometry procedures,
— methods of interpretation of results and discussion of data analysis. and
— case studies
2 Normative references
The following documents are referred to in the text in such a way that some or all of their content constitutes requirements of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.
ISO/TS 80004.1. Nanotechnologies —Vocabulary – Part 1: Core terms
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISOITS 80004.1 and the following apply.
ISO and IEC maintain terminological databases for use in standardization at the following addresses:
• ISO Online browsing platform: available at httpl/www.iso.org/obp
• IEC Electropedia: available at http:flwww.electropedia.orgl
3.1 General terms
interlaboratory comparison
organization. performance and evaluation of measurements or tests on the same or similar items by two or more laboratories in accordance with predetermined conditions.
3.2.7 film thickness d distance between the top and bottom boundaries of the laminar film, where each boundary is determined as the interface at which the refractive index changes
3.2.8 Brewster’s angle angle of incidence at which there is no reflection of p-polarized light at an uncoated optical surface
4 Measurement of ellipsometry
4.1 General
The practical protocol of ellipsometry is well-established.
Ellipsometry measures a change in polarization as light reflects from a sample. The polarization change is represented as an amplitude ratio， 甲，and the phase difference, A. The basic components of the ellipsometry measurement are a light source, a polarizer, a polarization analyser and a detector, as shown in Figure 1. See references [2]1 and [3] for principles of ellipsometry.
6.2 Setting analysis model
Ellipsometric modelling can be divided into four major steps:
1) sample structure definition;
2) sample simulation;
3) choice of variables and fitting;
4) a check of model reliability.
In most general cases, to build a sample model one has to define the following unknowns:
a) substrate dielectric function;
b) each layer s thickness;
c) each layer’s dielectric function and/or composition;
d) overlayer thickness;
e) overlayer dielectric function and/or composition.IEC TR 63258 pdf download.
